Method for Producing a Detachment Area in a Solid Body

ABSTRACT

A method for producing a detachment area in a solid body in described. The solid body has a crystal lattice and is at least partially transparent to laser beams emitted by a laser. The method includes: modifying the crystal lattice of the solid by a laser beam, wherein the laser beam penetrates through a main surface of a detachable solid portion of the solid body, wherein a plurality of modifications are produced in the crystal lattice, wherein the modification are formed in a plane parallel to the main surface and at a distance from one another, wherein as a result of the modifications, the crystal lattice cracks the regions surrounding the modifications sub-critically in at least the one portion, and wherein the subcritical cracks are arranged in a plane parallel to the main surface.

The present invention relates to methods for creating a detachment areain a solid and to methods for at least partial splitting of a solid.

The splitting of solids, in particular wafers is classicallyaccomplished by sawing. However, this separation method has manydisadvantages. Thus, during sawing chips are always produced which thusform disturbed base material. Furthermore, the thickness fluctuation ofthe sawn discs also increases with increasing sawing height. Furthermorethe sawing element has the effect that grooves are formed on thesurfaces of the discs to be separated from one another.

It is therefore apparent that the “sawing” separation method incurs veryhigh material costs and costs for re-working.

The document WO 2013/126927 A2 further discloses a method for separatingdevice layers from an initial wafer. According to WO 2013/126927 A2, avery strong heating of the entire arrangement takes place as a result oflaser action. This heating is required in order to achieve stressesinside the solid over the various coefficients of thermal expansion ofthe solid material and a “handler”. Here it is apparent that the thermalload-bearing capacity of the “handler” must be very high since very hightemperatures occur. Furthermore, according to WO 2013/126927 A2 thelaser beams are always introduced into the solid via a surface which isnot part of the layer to be separated. This also results is strongheating of the solid. The high temperatures also have the disadvantagethat the solid distorts and undesirably expands with the result thatcrystal lattice modifications can only be produced very imprecisely.

According to WO 2013/126927 A2, therefore thick and large solids cannotbe processed.

It is therefore the object of the present invention to provide analternative method for separating solid parts, in particular of severalsolid layers, from a solid. The aforesaid object is solved according tothe invention by a method for producing a detachment region in a solid,in particular for splitting the solid along the detachment region,wherein the solid portion to be detached is thinner than the solidreduced by the solid portion. According to the invention, the methodpreferably comprises at least the step of modifying the crystal latticeof the solid by means of a modifying agent, in particular a laser, inparticular a pico- or femtosecond laser, wherein the modifications, inparticular the laser beams penetrate into the solid via a surface of thesolid portion to be detached, wherein a plurality of modifications areproduced in the crystal lattice, wherein as a result of themodifications, the crystal lattice cracks the regions surrounding themodifications, at least in respectively one portion, in particularsub-critically.

This solution is advantageous since it allows a defined weakening of thesolid without causing chippings, for example.

Furthermore, the present invention provides the possibility for thefirst time that a solid need not be shortened orthogonally to itslongitudinal direction to be shortened but that it is acted upon by thelaser in its longitudinal direction in such a manner that a solid layeris separated. This method further has the advantage that the laser beamsneed not penetrate into the solid over the entire radius of the solidbut can be introduced into the solid via a layer preferably parallel tothe separation layer or detachment layer. This is particularlyappropriate in solids whose radius is greater than or equal to thethickness of the solid layer to be separated.

According to a further preferred embodiment of the present invention,the crystal lattice tears at least for the most part in each case in aportion spaced apart from the centre of the respective modification.This solution is particularly advantageous since it reduces the need forreworking of the part of the solid on which a smaller volume of themodification or of the modifications remains after the separation.

The aforesaid object is also solved according to the invention by afurther method for producing a detachment region in a solid, inparticular for splitting the solid along the detachment region,preferably comprises at least the steps of modifying the crystal latticeof the solid by means of a modifying agent, in particular a laser, inparticular a pico- or femtosecond laser or an ion implanting medium, bymeans of which ions for modification of the crystal lattice areintroduced into the crystal lattice, wherein a plurality ofmodifications are produced in the crystal lattice, and the conditioningof at least a plurality of the modifications by a conditioning agent, inparticular a temperature-control device, wherein the crystal latticecracks in the regions surrounding the modification at least inrespectively one portion due to the conditioning.

The aforesaid object is also solved according to the invention by afurther method for at least partial splitting of a solid, wherein somany modifications are produced in the crystal lattice that theindividual cracks combine to form a main crack through which the solidis at least partially and preferably completely split.

This solution is advantageous since it allows a defined splitting of thesolid without causing chippings, for example.

The aforesaid object is also solved according to the invention by afurther method for at least partial splitting of a solid, wherein themodifications are produced in a first section of the solid, whereby amain crack extending through the individual, in particular sub-criticalcracks is formed, wherein after the formation of the main crack or as aresult of the formation of the main crack further modifications areproduced in at least one further section of the solid, wherein the maincrack is guided through cracks in the area of the further modificationsalso into the at least one further section, in particular until theinitially locally detached solid portions are completely separated bythe main crack.

This solution is advantageous since it allows a defined splitting of thesolid without causing chippings, for example.

Sub-critical preferably means here that the crack propagation comes to ahalt or stops before the crack splits the solid into at least two parts.Preferably a sub-critical crack propagates less than 5 mm, in particularless than 1 mm, in the solid. The modifications are preferably producedin such a manner that for example, when separating flat solid plates,the sub-critical cracks preferably propagate for the most part in thesame plane, in particular propagate in a plane parallel or aligned in adefined manner to the surface of the solid through which the laser beamspenetrate into the solid. The modifications are preferably produced insuch a manner that, for example, during separation of uneven solids, thesub-critical cracks preferably propagate in a defined manner e.g. in aspherical layer or film in such a manner that the detachment regionacquires a defined, in particular spherical shape.

The solid is preferably an ingot or a wafer. Particularly preferably thesolid is a material which is at least partially transparent to laserbeams. It is therefore still feasible that the solid comprises atransparent material or consists or is made partially from a transparentmaterial such as, for example sapphire. Further materials which areconsidered here as solid material alone or combined with anothermaterial are, for example, “wide band gap” materials, InAlSb,high-temperature superconductors, in particular rare earth cuprates(e.g. YBa₂Cu₃O₇). It is additionally or alternatively feasible that thesolid is a photomask wherein preferably any photomask material known atthe filing date and particularly preferably combinations thereof can beused as photomask material in the present case. Furthermore, the solidcan additionally or alternatively comprise or consist of silicon carbide(SiC).

According to a further preferred embodiment of the present invention,the energy of the laser beam of the laser, in particular fs laser(femtosecond laser) is selected in such a manner that the damagepropagation in the solid or in the crystal is less than three times theRayleigh length, preferably less than the Rayleigh length andparticularly preferably less than a third of the Rayleigh length.

According to a further preferred embodiment of the present invention,the crystal lattice cracks at least for the most part in a portionspaced apart from the centre Z of the respective modification.

According to a further preferred embodiment of the present invention,the crack passes at least in sections through the majority, inparticular through the entirety of the modifications or runs at adistance at least to the entirety of the modifications.

According to a further preferred embodiment of the present invention, afirst number of modifications are produced with their centre Z on oneside of the detachment region and a second number of modifications areproduced with their centre on the other side of the detachment region.

According to a further preferred embodiment of the present invention,the modifications are produced by means of lasers, wherein the pulsespacings between 0.01 μm and 10 μm are provided and/or linear spacingsbetween 0.01 μm and 20 μm and/or a pulse repetition frequency between 16kHz and 1024 kHz is provided.

According to a further preferred embodiment of the present invention,the wavelength of the laser beam of the laser, in particular of the fslaser, is selected in such a manner that the absorption of the solid orthe material is less than 10 cm⁻¹, and preferably less than 1 cm⁻1 andparticularly preferably less than 0.1 cm⁻¹.

According to a further preferred embodiment of the present invention,the individual modifications or defects or damage points result from amulti-photon excitation caused by the laser, in particular the fs laser.

According to a further preferred embodiment of the present invention,the solid is connected to a cooling device by means of a solid surface,wherein the solid surface which is connected to the cooling device isconfigured to be parallel or substantially parallel to the surface viawhich the laser beams penetrate into the solid, wherein the coolingdevice is operated depending on the laser application, in particulardepending on the temperature control of the solid resulting from thelaser application. Particularly preferably the surface via which thesolid is connected to the cooling device is precisely opposite thesurface via which the laser beams penetrate into the solid. Thisembodiment is advantageous since an increase in the temperature of thesolid which takes place during production of the modifications can belimited or reduced. Preferably the cooling device is operated in such amanner that the heat input introduced by the laser beams into the solidis removed from the solid by the cooling device. This is advantageoussince the occurrence of thermally induced stresses or deformations canbe significantly reduced thereby.

According to a further preferred embodiment of the present invention,the cooling device has at least one sensor device for detecting thetemperature of the solid and brings about the cooling of the soliddepending on a predetermined temperature profile. This embodiment isadvantageous since a temperature variation of the solid can be detectedvery precisely by the sensor device. Preferably the temperaturevariation is used as data input to control the cooling device.

According to a further preferred embodiment of the present invention,the cooling device is coupled to a rotating device and the coolingdevice with the solid arranged thereon is rotated during the productionof the modifications by means of the rotating device, in particular isrotated at a speed of more than 100 revolutions per minute or more than200 revolutions per minute or more than 500 revolutions per minute.

According to a further preferred embodiment of the present invention, inat least two different regions of the solid the number of modificationsproduced per cm² is different, wherein in a first region a first blockof modification lines is produced, wherein the individual modificationsper line are produced preferably spaced apart from one another by lessthan 10 μm, in particular less than 5 μm or less than 3 μm or less than1 μm or less than 0.5 μm and the individual lines of the first block areproduced spaced apart from one another by less than 20 μm, in particularless than 15 μm or less than 10 μm or less than 5 μm or less than 1 μm,wherein a first partial detachment region is formed by the first blockof modifications and wherein in a second region a second block ofmodification lines is produced, wherein the individual modifications perline are produced preferably spaced apart from one another by less than10 μm, in particular less than 5 μm or less than 3 μm or less than 1 μmor less than 0.5 μm and the individual lines of the second block areproduced spaced apart from one another by less than 20 μm, in particularless than 15 μm or less than 10 μm or less than 5 μm or less than 1 μm,wherein a second partial detachment region is formed by the second blockof modifications, wherein the first region and the second region arespaced apart from one another by a third region, wherein in the thirdregion none or substantially no modifications or fewer modifications percm² compared with the first or second region are produced by means oflaser beams and the first region is spaced apart from the second regionby more than 20 μm, in particular more than 50 μm or more than 100 μm ormore than 150 μm or more than 200 μm. This embodiment is advantageoussince as a result of the local generation of modification blocks, largemechanical stresses can be produced in the solid in such a manner that alocal tearing of the solid can take place. It was identified that themodification blocks have the effect that a crack is also guided stablyin a region between two modification blocks. Thanks to the modificationblocks, a controlled and very precise crack propagation can be broughtabout with few modifications. This has considerable advantages since theprocessing work is shortened, the energy consumption is reduced and theheating of the solid is reduced.

Preferably the modifications in the first block are produced in pulsespacings between 0.01 μm and 10 μm and/or linear spacings between 0.01μm and 20 μm are provided and/or a pulse repetition frequency between 16kHz and 20 MHz is provided.

Further advantages, aims and properties of the present invention areexplained with reference to the following description of appendeddrawings in which the separation method according to the invention isshown as an example. Components or elements which are preferably used inthe method according to the invention and/or which agree at leastsubstantially with regard to their function in the figures can becharacterized with the same reference numbers, wherein these componentsor elements need not be numbered or explained in all the figures.

In the figures:

FIG. 1 shows a solid during the treatment according to the invention andthe two parts of the solid after they have been separated from oneanother;

FIG. 2a-2c shows microscope photographs of crystal latticemodifications;

FIG. 3a-3b shows further microscope photographs of crystal latticemodifications;

FIG. 4a-4b shows yet further microscope photographs of crystal latticemodifications;

FIG. 5a-5f shows a schematic view of modifications and the detachmentregion;

FIG. 6a-6d shows a further schematic view of modifications and thedetachment region;

FIG. 7a-7d shows yet further schematic views of modifications and thedetachment region;

FIG. 8 shows a schematic view of different modification concentrations;

FIG. 9a-9c shows three schematic cross-sectional views which each showmodification blocks in a solid;

FIG. 9d-9e show two schematic views in each case along the detachmentregions of split solids where the view according to FIG. 9d shows nomodification residue and the view according to FIG. 9e showsmodification residue;

FIG. 10a-c shows three schematic views of modification blocks and thelocal solid weakenings or local solid initial cracks produced as aresult;

FIG. 11a-c shows three schematic views of exemplary crack profiles;

FIG. 12a-c shows the multiple separation of solid portions or solidlayers, in particular wafers, from a solid;

FIG. 13a-d shows several steps from the preparation of the solid to thecrack triggering;

FIG. 14a shows a schematic view of the state after separation of thesolid portion;

FIG. 14b shows another laser application to the residual solid toproduce modifications for separating a further solid layer;

FIG. 14c shows a schematic view of the residual solid arranged on acooling device, wherein the cooling device is arranged on a traversingdevice, in particular a rotary table;

FIG. 14d shows a schematic view to produce modifications in the solid;

FIG. 15 shows a schematic view of a cooling device, in particular acooling chuck;

FIG. 16 shows a schematic view of a preferably used optics; and

FIG. 17 shows a schematic view of superposed beams or beam fractionswhen producing a modification in the solid.

The reference number 1 here characterizes the solid. Modifications 9according to the invention are produced in the solid 1 in order to forma detachment region 2 at which or along which the solid 1 is separatedinto at least two components. The modifications 9 bring aboutsub-critical cracks through which the detachment region 2 is created.The modifications 9 are produced by at least one laser beam 4. The laserbeam 4 penetrates via a preferably treated, in particular polishedsurface 5 into the preferably at least partially transparent solid 1. Atthe surface 5 the at least one laser beam is preferably refracted, whichis characterized by the reference number 6. The at least one laser beamthen forms a focus 8 to produce the modification. The polished surface 5can also be designated as main surface 18 (cf. FIG. 3a ).

The reference number 10 characterizes a first solid portion aftercutting through the solid 1 and the reference number characterizes thesecond solid portion after cutting through the solid 1. The referencenumber 11 further characterizes the surfaces along which the two solidportions 10, 12 were separated from one another. It is apparent that themodifications 9 are provided substantially, for the most part orcompletely in the solid portion 10 and after the separation the solidportion 12 preferably has none or only very few modifications, inparticular less than 30 percent of the modifications produced. However,it is also feasible that the modifications for the most part remain inthe second solid portion 12.

FIGS. 2a to 2c show different microscopic views of a solid 1 conditionedor modified by means of a laser, in particular consisting predominantly,substantially or completely of, for example a semiconductor material, inparticular of SiC.

FIG. 2a shows a 6H—SiC line defect field 1E which was produced withpulse spacings of 0.4 μm, linear spacings of linearly produced crystallattice modifications 20, 33 of 2 μm and a pulse repetition frequency of128 kHz. Here however it is also feasible that one of the parameters,several of the parameters, in particular two of these parameters or allof these parameters (pulse spacings, linear spacings pulse repetitionfrequency) are specified as varied or changed. For example, the pulsespacings can be provided, for example, between 0.01 μm and 10 μm and/orthe linear spacings can be provided between 0.01 μm and 20 μm and/or thepulse repetition frequency can be provided between 16 kHz and 1024 kHz.

FIG. 2b shows an enlarged detailed view of the area identified by theframe in FIG. 2 a. It can be seen that the block spacings 24, 26 arepreferably configured to be uniform and, for example, are 66 μm. FIG. 2calso shows block spacings which are around 66 μm. However it is alsofeasible that the block spacings lie in different ranges such as, forexample, in the range between 4 μm and 1000 μm.

The diagram in FIG. 2a shows a plan view of a solid through a polishedsurface of the solid. The structure shown is therefore formed inside thesolid or has been produced by modification, in particular by means oflaser.

Crack formation is preferably not initiated in the configuration shown.

FIGS. 3a and 3b show microscopic views of solids modified in the senseof the invention. In FIG. 3a the reference number 14 preferablyidentifies the location of the start of processing, i.e. the location atwhich the modification of the crystal lattice of the solid 1 ispreferably begun. The reference number 9 identifies the modified area inthe solid 1. It can be seen from this diagram that a crack 13 propagatesin the solid 1 eccentrically to the modified area 9 or offset to thecentre 15 of the modified area 9. It is hereby possible that thelocation and direction of the propagation of the crack 13 are predefinedby defined parameters to produce the modification, wherein the crack 13in the example shown runs preferably parallel or substantially parallelto the main surface 18. The crack 13 can thus be produced or initiatedand guided through the parameter setting/s specifically through themodifications 9, at the edges of the modifications 9 or at a distancefrom the modifications 9.

The underside of the solid 1, in particular the wafer is given by thereference number 16. Furthermore the reference number 17 indicates areference length which preferably measures 50 μm. The cross-sectionalarea shown extends at right angles to the main surface 18 of the solid1, i.,e. over the height of the lateral surface 19, wherein themodifications 9 are preferably introduced into the solid 1 via the mainsurface 18 or the modifications 9 are preferably produced through themain surface 18. The main surface 18 is particularly preferably amultiple, in particular at least twice or at least three times or atleast four times or at least ten times or at least 20 times or at least50 times larger than the lateral surface 19.

FIG. 3a shows a 6H—SiC line defect field 1C which was produced withpulse spacings of 0.2 μm, linear spacings of linearly produced crystallattice modifications 20, 33 of 3 μm and a pulse repetition frequency of128 kHz. Here however it is also feasible that one of the parameters,several of the parameters, in particular two of these parameters or allof these parameters (pulse spacings, linear spacings, pulse repetitionfrequency) are specified as varied or changed. For example, the pulsespacings can be provided, for example, between 0.01 μm and 10 μm and/orthe linear spacings can be provided between 0.01 μm and 20 μm and/or thepulse repetition frequency can be provided between 16 kHz and 1024 kHz.

FIG. 3b shows a plan view of a part of the solid 1 and through thepolished main surface 18 of the modifications 9. The individualmodifications 9 are produced according to this diagram in such a mannerthat several of them form a line 20, 22. However it is also feasiblehere that the modifications are produced homogeneously at leastpartially in more than one direction, in particular in two directions,in at least two directions or in three directions. The modifications 9are particularly preferably produced preferably uniformly or homogeneousdistributed in a plane parallel to the main surface 18. However, it isalso feasible that in one direction (length or width or height) moremodifications 9 are produced than in one or two other directions.Furthermore it is feasible that the modifications 9 are produced in sucha manner that they form patterns. Furthermore the modifications 9 can beproduced in the sense of the present invention in various regions of thesolid 1, wherein the regions preferably have the same dimensions, indifferent numbers and/or with different parameters.

The reference number 17 in FIG. 3b characterizes a reference lengthwhich preferably measures 100 μm.

FIG. 4a shows a 6H—SiC line defect field 1A which was produced withpulse spacings of 0.2 μm, linear spacings of linearly produced crystallattice modifications 20, 22 of 1 μm and a pulse repetition frequency of128 kHz. Here however it is also feasible that one of the parameters,several of the parameters, in particular two of these parameters or allof these parameters (pulse spacings, linear spacings, pulse repetitionfrequency) are specified as varied or changed. For example, the pulsespacings can be provided, for example, between 0.01 μm and 10 μm and/orthe linear spacings can be provided between 0.01 μm and 20 μm and/or thepulse repetition frequency can be provided between 16 kHz and 1024 kHz.

It can be further deduced from FIG. 4a that a crack 13 propagates in thesolid 1 at a distance from the generated modifications 9. The crack 13therefore propagates at a distance from the centre of the modifications9 or the crack propagates in an area of the solid 1 which is at adistance from the main modification portion. The main modificationportion is, for example, in the case of modifications 9 produced bylaser, preferably the portion of the solid 1 in which the laser has itsfocus.

The reference number 17 characterizes the reference length which ispreferably 100 μm.

FIGS. 5a to 5f show various diagrams of the modification-crackgeneration relationship. FIG. 5a shows for example a modification 9shaped, for example, according to the shape of a laser waist. However itis pointed out that the shape of the modification 9 is only shownschematically. Furthermore, shapes deviating from the shape shown arealso feasible. A modification 9 can thus preferably have a shape whichlies in the design space between a spherical shape, in particular acircle, and a polygon, in particular a square, in a particular arectangle such as, for example a square. Furthermore, FIG. 5a shows thatthe detachment region 2 does not extend through the centre Z of themodification 9. Preferably the detachment region 2 is spaced apart fromthe centre of the modification by 1/20, or 1/10 or ⅕ or ¼ or ⅓ or halfthe maximum length of the modification 9.

FIG. 5b shows, for example, a variant according to which the detachmentregion 2 runs past the modification 9 at the outer edge or in the areaof the outer edge of the modification 9 and the modification thereforeparticularly preferably only passes on the outside but does not runthrough the modification.

FIG. 5c shows another variant according to which the detachment region 2is preferably located at a distance from the modification 9 of at least0.01 μm or at least 0.1 μm or at least 1 μm or at least 5 μm or at least10 μm.

FIGS. 5d to 5f are constructed similarly to FIGS. 5a to 5 c. However,FIGS. 5d to 5e show a variant according to which the effect achieved bythe modification 9, namely the local separation of the crystal latticeof the solid 1 only takes place as a result of the interaction ofseveral modifications 9, in particular of at least 2, 5, 10, 20, 50 orat least 100 modifications.

FIGS. 6a to 6d show various arrangements of modifications 9 and thedetachment regions 2 formed as a result of the modifications 9. Asrequired, the parameters required to produce the modification cantherefore be adjusted in such a manner that the detachment region 2 runsthrough the modifications 9 (cf. FIGS. 6a and 6b ) or that thedetachment region is at a distance from the modifications 9 (cf. FIGS.6c-6d ).

FIGS. 7a-7d show further variants according to which a detachment region2 is formed in a solid 1 as a result of the creation of modifications 9.According to FIGS. 7a and 7 b, the centres of the modifications 9 and 23are provided on one side of the detachment region 2. However it is alsofeasible here that the modifications are produced identically apart fromtheir production site (in particular the distance from the mainsurface). It is further feasible that additionally or alternatively tothe location of the modifications 9, 23, the focus and/or the amount ofenergy and/or the application time etc. varies. In FIGS. 7c to 7d thecentres of the modifications 9 and 23 are each on different sides of thedetachment region 2.

It is feasible here that the centres of the modifications 9, 23 areformed at the same distance or at different distances from thedetachment region 2. It is further feasible that additionally oralternatively to the location of the modifications 9, 23, the focusand/or the amount of energy and/or the application time etc. varies oris set differently.

FIG. 8 shows an arrangement according to which the modifications 9 areproduced locally in different concentrations (A-D) and/or distributions.It is feasible here for example that in order to initiate a main crackconnecting the individual cracks, locally different modificationconcentrations or distributions are provided. Preferably moremodifications are produced in the area of a main crack initiation pointor a higher modification density is provided.

It is furthermore pointed out that the individual variants shown inFIGS. 5a -5 f, 6 a-6 d, 7 a-7 d, 8 can preferably be combined with oneanother.

FIG. 9a shows that in at least two different regions of the solid 1 thenumber of modifications 9 produced per cm² is different. In a firstregion a first block 91 of modification lines is produced, wherein theindividual modifications 9 per line are produced preferably spaced apartfrom one another by less than 10 μm, in particular less than 5 μm orless than 3 μm or less than 1 μm or less than 0.5 μm. The individuallines of the first modification block 91 are preferably produced spacedapart from one another by less than 20 μm, in particular less than 15 μmor less than 10 μm or less than 5 μm or less than 1 μm. Due to the firstblock of modifications 91 mechanical stresses are produced in the solid1.

In a second region a second block 92 of modification lines is produced,wherein the individual modifications 9 per line are produced preferablyspaced apart from one another by less than 10 μm, in particular lessthan 5 μm or less than 3 μm or less than 1 μm or less than 0.5 μm. Theindividual lines of the second block 92 are produced spaced apart fromone another preferably by less than 20 μm, in particular less than 15 μmor less than 10 μm or less than 5 μm or less than 1 μm. Due to thesecond block of modifications 92 mechanical stresses are produced in thesolid 1.

The first region and the second region are spaced apart from one anotherby a third region, wherein in the third region none or substantially nomodifications are produced by means of laser beams and the first regionis spaced apart from the second region by more than 20 μm, in particularmore than 50 μm or more than 100 μm or more than 150 μm or more than 200μm.

The modifications 9 are preferably introduced into the solid 1 here viaa surface 5 of the subsequent solid layer 12. The distance between thesurface 5 via which the laser beams are introduced to the modifications9 is preferably less than the distance of the modifications 9 to afurther surface 7 of the solid 1 located at a distance from the surface5 and preferably aligned parallel.

It can be seen that according to this diagram that the detachment region2 lies on one side of all the modifications 9, in particular below andabove in the longitudinal direction of the solid and preferably at adistance from the modifications 9.

FIG. 9b shows a similar basic structure. According to FIG. 9b howeverthe detachment region 2 extends through the modifications 9.

FIG. 9c further shows that the detachment region 2 can also run throughthe centre of the modifications 9.

The course of the detachment region 2 is adjustable here, for example,by means of the number of modifications 9 and/or the sizes of themodifications 9 and/or the spacing of the individual modifications 9 ofa block 91, 92.

FIG. 9d shows the residual solid 1 after separation of the solid layer12 along the detachment region 2 shown in FIG. 9 a. Since in this casethe modifications 9 are completely removed from the residual solid 1,the residual solid 1 shows no residues of these modifications 9.

FIG. 9e on the other hand shows residues of the modifications 9. Thesemodification residues are obtained if the solid 1 is separated along adetachment region 2 shown in FIG. 9b or 9 c. Furthermore, it can beidentified that the modification blocks 91, 92 are preferably separatedfrom one another by fields 901, 902, 903 without modifications or withfew modifications per cm². The fields without modification 9 or with fewmodification 9 can here preferably be smaller or larger than the regionin which the modification blocks 91, 92 are produced. Preferably atleast individual ones, a plurality of or the majority of the regions inwhich the modification blocks 91, 92 are produced are many time, inparticular at least 1.1 times, or 1.5 times or 1.8 times or 2 times or2.5 times or 3 times or 4 times larger than the regions in which nomodifications 9 or few modifications 9 are produced.

FIGS. 10a-10c show another embodiment of the present invention.According to these diagrams, the modification blocks 91, 92 are used toproduce local material weakenings or local solid initial cracks or localincreases in stress. The reference number 25 here characterizes a firstpartial detachment region or crack portion in which the local materialweakenings or local solid initial cracks or local increases in stressoccur and the reference number 27 here characterizes a second partialdetachment region or crack portion in which the local materialweakenings or local solid initial cracks or local increases in stressalso occur. The individual partial detachment regions or crack portionspreferably form ends 71, 72 via which the respective partial detachmentregion or crack portion can be enlarged.

FIGS. 11a to 11c show embodiments according to which the course of thedetachment region 2 as a result of the generation of the modificationblocks 91, 92, 93 is controlled in such a manner that predeterminedpatterns or thickness variations are produced or compensated. The courseof the detachment region 2 is hereby adjustable, for example by thenumber of modifications 9 and/or the size of the modifications 9 and/orthe spacing of the individual modifications 9 of a block 91, 92, 93.

In FIG. 11a the detachment region 2 is formed by the componentsspecified hereinafter: crack 31 between outer edge and firstmodification block 91, which is followed by the first crack portion 25produced directly by the first block 91 of modifications 9, which isfollowed by crack 32 between the two modification blocks 91 and 92,which is followed by the second crack portion 27 produced directly bythe second block of modifications 9, which is followed by the crack 33between the modification block 92 and the first outer edge of the solid1. It is apparent as a result that the detachment region 2 can bepredefined in such a manner that a crack for separation of the solidlayer 12 from the solid 1 can run on different planes in sections.

According to FIG. 11b it is apparent that the detachment region 2 can beselected in such a manner that the crack course includes severalgeometrical turning points.

FIG. 11c shows another possible embodiment of the detachment region 2purely as an example.

With regard to FIGS. 11a-11c it should be noted that the formation ofwavy profiles can offer advantages for the further treatment of theexposed surfaces, in particular for subsequent grinding and/or polishingsteps. As a result of the actually very small height of themodifications 9, the actual waviness produced as a result can only bedetected with very high resolution. However, the crack can be controlledvery effectively by means of modification blocks such as, e.g. theblocks 91, 92, 93 even in regions in which none or few modifications 9are produced.

FIGS. 12a-12c show a multiple treatment of a solid 1, in particular aningot, wherein the solid 1 is in each case thinned by a solid portion12, in particular a solid layer 12.

FIGS. 12a-12c therefore each show the application of laser radiationfrom a laser source on the solid 1, wherein the laser beams penetrateinto the solid 1 via a surface 5, 502, 504 of the solid layer 12 to beseparated. A predefined portion of the solid 1 inside the solid 1 istemperature-controlled in a defined manner by the laser radiation toform a detachment region 2, the temperature produced in the predefinedportion of the solid 1 is preferably so high that the material formingthe predefined portion undergoes modification 9 in the form of apredetermined material conversion. The number and arrangement of themodifications 9 can be adjusted and is preferably predefined. Afterseparation of the solid portion 12, a renewed application of laserradiation of the laser light source is made to the residual solid 1,wherein the laser radiation temperature-controls a predefined portion ofthe residual solid 1 inside the residual solid 1 in a defined manner toform a detachment region 2 and the temperature produced in thepredefined portion of the solid 1 is again so high that the materialforming the predefined portion undergoes a predetermined materialconversion. Thus, for example, solid portions 12 of the same, similar ordifferent thickness, in particular solid layers 12, in particularwafers, can be separated from the solid 1. Preferably the solid 1 hassuch a length that a plurality of, in particular more than 2 or morethan 5 or more than 10 or more than 20 or more than 50 or more than 100or more than 150 or more than 200 solid layers 12 having a thickness ofless than 1000 μm, in particular of less than 800 μm or of less than 500μm or of less than 300 μm or of less than 200 μm or of less than 150 μmor of less than 110 μm or of less than 75 μm or of less than 50 μm canbe separated therefrom. Preferably each separation of a solid layer 12is followed by a machining of the newly exposed surfaces 502, 504 of theresidual solid 1.

FIGS. 13a-13f show schematic diagrams of different process situationssuch as can occur according to the method according to the invention forproducing solid layers 12.

FIG. 13a shows the preparation of a solid 1, in particular an ingot.

According to FIG. 13b the prepared solid 1 is arranged on a coolingdevice 3. Preferably the cooling device 3 is a cooling chuck.Particularly preferably the solid 1 is coupled or glued or welded orscrewed or clamped on a tool carrier (chuck), wherein the tool carrierpreferably comprises a cooling functionality and is thereby preferred tothe cooling device 3. The tool carrier preferably consists of an alloyhaving a composition of 45%-60%, in particular 54% iron, 20%-40%, inparticular 29% nickel and 10%-30%, in particular 17% cobalt. Thepercentage information here relates to the fraction of the total mass.An example for a preferred cooling device 3 is shown in FIG. 11. Thesolid 1 and the cooling device 3 preferably have the same or a similarthermal expansion. A similar thermal expansion is here preferablyunderstood as that thermal expansion with a temperature increase of 10°C. in a temperature range from −200° C. to 200° C., for which thedifference in the thermal expansions of the solid 1 and the coolingdevice 3 is less than 50%, in particular less than 25% or less than 10%of the thermal expansion of the object showing the greatest expansion(cooling device or ingot). The thermal expansion of the solid 1 ispreferably less than 10 ppm/K, in particular less than 8 ppm/K or lessthan 5 ppm/K such as for example less than ppm/K or substantially 4ppm/K or precisely 4 ppm/K.

The solid 1 is fixed, in particular glued on the cooling device 3preferably in the longitudinal direction with its underside 7 whichpreferably lies opposite the surface 5 in the longitudinal direction.The laser beams are therefore introduced in the direction of the coolingdevice 3 into the solid 1 to produce the modifications 9 via the surface5 which is part of the solid layer 12 to be separated.

FIG. 13c shows schematically the production of modifications 9 by meansof laser beams. The cooling device 3 here has the effect that the energyor heat introduced by the laser beams into the solid 1 is at leastpartially and preferably predominantly removed from the solid 1.

FIG. 13d shows a schematic sectional view of the solid 1 during theproduction of the modifications 9. According to this example, fourblocks of modifications 9 can be seen which result in the crack portions25, 27, 28, 29. Adjacent to the blocks with modifications 9, thereference numbers 41, 42, 43, 44 and 45 each identify regions withoutmodifications 9 or regions in which fewer modifications 9 are producedthan in the regions in which blocks of modifications 9 are produced. Thetotal crack is in this case preferably formed automatically as a resultof the stresses produced due to the creation of the partial cracks.

FIG. 14a shows a view after the laser application shown in FIG. 13 c.

FIG. 14b shows a renewed step of introducing modifications 9 into theresidual solid 1 which is reduced in its length at least by the alreadyseparated solid layer 12.

FIG. 14c shows schematically a further preferred embodiment. The coolingdevice 3 is here coupled on the one side to the solid 1 and on the otherside to a traversing device 30, in particular an X/Y traversing deviceor a rotary table. The traversing device 30 brings about a movement ofthe solid 1, with the result that this can be moved in a defined mannerwith respect to the surroundings and a laser optics, in particular ascanner.

FIG. 14d shows a more detailed schematic view of FIG. 14 c. The roundarrow inside the traversing device 30 identifies that this is rotatable.Furthermore a coupling layer, in particular an adhesive layer isprovided between the solid 1 and the cooling device 3. The couplinglayer 30 is here preferably designed in such a manner that it withstandsa plurality of treatment cycles, in particular more than 200 or morethan 300 or more than 500 treatment cycles at high mechanical or thermalload. Furthermore it can be deduced from this diagram that the laserbeam source 401 guides laser beams preferably along a first laser beamconductor 402 to an optical system 40 from where the laser beams reach ascanner by means of a further laser beam conductor 403. Alternativelyhowever it is also feasible here that at least the laser beam source 401and the scanner 400 are provided.

FIG. 15 shows the cooling device 3. The cooling device 3 preferably hasa guide-support structure which is preferably formed by a tool carrier,in particular a chuck. The guide-support structure preferably has around basic shape. This is advantageous since an imbalance with regardto spinning processes can be avoided more easily. Furthermore, the roundbasic shape is preferably provided with flattened sections 95-98. Theseflattened sections are advantageous since they allow or facilitate acoarse alignment and/or cassetting.

Preferably the cooling device 3, in particular the guide-supportstructure of the cooling device 3, has a good thermal conductivity.Furthermore the cooling device 3 preferably comprises anodized aluminum,thus reducing or preventing abrasion particles. This is advantageoussince the clean room compatibility is increased. Furthermore the chuckis preferably compatible to the separation process.

Furthermore, preferably at least two aligning elements 65-68 areprovided. Preferably the aligning elements 65-68 are configured asaligning holes or slots or pins. The aligning elements 65-68 preferablyform entrainers for the non-positive and/or positive transmission ofrotation. Preferably the aligning elements 65-68 have steel or ceramicinserts whereby a high wear resistance is achieved. The aligningelements 65-68 are preferably used to couple the cooling device 3 to thetraversing device 30.

Furthermore, register pins can be provided, these can be designed as,for example, downholders whereby, for example, a force and/or tight fitwith the guide-support structure can be produced.

A notch, groove or marking 76 is further preferably provided on thecooling device 3. This feature is advantageous since the solidorientation, in particular ingot orientation is apparent as a result.Knowledge about the orientation of the solid, in particular the ingotcan be used to adapt the modifications 9 produced by means of the laserbeams to the crystallographic orientation.

The reference number 75 identifies purely as an example an optional datacarrier element and/or data transmission element and/or data acquisitionelement. Preferably the element identified by the reference number 75 isimplemented as a barcode and/or RFID element and/or SAW sensor. This inparticular allows integration into a manufacturing execution system(MES).

Furthermore, cooling channels for guiding a cooling fluid are preferablyprovided or formed on or in the guide-support structure. The coolingchannel or channels 78 can be used for temperature control of the solid,the cooling device 3 and/or a machine holder, in particular thetraversing device 30. Cooling fluid, in particular a liquid, can besupplied into the cooling channel 78 via an inlet 77 and removed via anoutlet 79. The interface or the coupling layer between solid 1 andcooling device 3 preferably has a high thermal conductivity, inparticular corresponding to the thermal conductivity of the solid 1 orthe cooling device 3. The cooling device 3 can be additionally oralternatively cooling via the air interface. At high rotational speedsor traversing speeds of the traversing device 30, the air layer formedaround the cooling device 3 is very thin so that heat can be removedvery efficiently.

Furthermore, an active thermostatic control is preferably integrated inthe MES. Additionally or alternatively a process monitoring is carriedout for different substrate sizes and thicknesses.

Preferably the fluid channels are sealed in the case of fixed mountingby means of pressing and in the case of rotation by means of, forexample, a central annular seal.

The reference number 69 identifies an optional sensor device which ispreferably designed as a temperature sensor. Preferably the sensordevice is an SAW temperature sensor.

FIG. 16 shows the optical system 40, 608 preferably used to produce themodifications 9. The method according to the invention thus preferablyalso comprises the step of providing an optical system 40, 608, whereinthe optical system 608 preferably comprises at least two deflectingelements 610, 612 for deflecting light beam fractions 616, 618. Thelight beams 616, 618 are preferably produced and emitted by the laserbeam source 401. Furthermore, the method according to the inventionpreferably comprises the step of deflecting at least two different lightbeam fractions 616, 618 of the emitted light beam 606 by means of thedeflecting elements 610, 612, 613, wherein the light beam fractions 616,618 are deflected in such a manner that they penetrate into the solid 1and wherein the different deflecting light beam fractions 616, 618 meetat a focus 620 inside the solid 1 and the physical modification 9, inparticular in the form of a lattice defect, is produced by the lightbeam fractions 616, 618 meeting at the focus 620 or the step ofproducing and emitting at least two light beams 606 by the light beamsource or radiation source arrangement 401. The method according to theinvention further preferably comprises the step of deflecting the lightbeams 606 by means of the deflecting elements 610, 612, 613 wherein thelight beams 606 are deflected in such a manner that they penetrate intothe solid 1 and wherein the different deflected light beams 606 meet ata focus 620 inside the solid 1 and the physical modification 9, inparticular in the form of a lattice defect, is produced by the lightbeams 6 meeting at the focus 620.

In addition, it is feasible that at least two different light beamfractions 616, 618 of at least one emitted light beam 606, in particularthe light beam fractions of several emitted light beams, or theplurality of emitted light beams 606 are deflected by means of thedeflecting elements 610, 612, 613, wherein the light beam fractions 616,618 or the light beams 606 are deflected in such a manner that theypenetrate into the solid 1 and wherein the different deflected lightbeam fractions 616, 618 or the different deflected light beams 606 meetat a focus 620 inside the solid 1 and the physical modification 9, inparticular in the form of a lattice defect, is produced by the lightbeam fractions 616, 618 or light beams 6 meeting at the focus 620.

Furthermore, according to the method according to the invention whenseveral light beams 606 are produced simultaneously, at least two lightbeams 606 and preferably all the light beams 606 can be split intodifferent light beam fractions 616, 618 which in particular coverdifferent paths and penetrate into the solid at surface portions 622,624 of the solid 1 located at a distance from one another, wherein thelight beam fractions 616, 186 of a respective light beam are deflectedby means of different deflecting elements 610, 612, 613.

The optical system 608 preferably comprises at least one light beamsplitting means 633, in particular a half-mirror or beam splitter and atleast one light beam 606 is split by means of the at least one lightbeam splitting means 633 into at least two light beam fractions 616,618. Preferably a light beam 606 is split by means of a light beamsplitting means 633, in particular a half-mirror into at least two lightbeam fractions 616, 618, wherein one light beam fraction 616 isdeflected by means of at least two deflecting elements 610, 612, 613, inparticular mirrors, in such a manner that it meets the other light beamfraction 618 inside the solid 1 to form a focus 620 for producing thephysical modification 9. Particularly preferably a plurality of physicalmodifications 9 are produced, wherein the physical modifications 9preferably form or describe a plane and/or a contour and/or a silhouetteand/or the external shape of a body.

The at least one light beam 606 emitted by the laser beam source 401preferably consists of coherent light and the light waves of the lightbeam fractions 616, 618 meeting at the focus 620 preferably have thesame phase or the same frequency.

Particularly preferably at least one light beam fraction 616, 618 or atleast one light beam 606 is deflected and focussed by a deflectingelement 610, 612, 613 configured as a parabolic mirror.

Furthermore, prior to the deflection and focussing, the at least onelight beam fraction 616, 618 or the at least one light beam 606preferably passes through a deflecting element 610, 612, 613, inparticular the parabolic mirror, a beam shaping device, in particular a1D telescope to change the focal shape.

The laser beam source 41 produces preferably at least or precisely twolight beams wherein the light beams 606 are generated with differentcolours depending on the band gap of the material of the solid 1 in sucha manner that the modification 9 is produced by a two-photon process.

Preferably a first laser field is formed by a first light beam 606,wherein the first light beam 606 comprises photons having a first energyand preferably a second laser field is formed by a second light beam606, wherein the second laser beam 606 comprises photons having a secondenergy, wherein the first laser field is weaker than the second laserfield and the first energy is higher than the second energy.

FIG. 17 shows the production of modifications by means of two laserbeams or two laser beam fractions in a schematic view. The modifications9 here preferably have a vertical extension of less than 50 μm andpreferably of less than 30 μm and particularly preferably of less than20 μm.

The focus 620 is preferably located at a distance of less than 1000 μmand preferably less than 500 μm and particularly preferably less than200 μm from a penetration surface 626 of the solid 1, wherein at leastindividual light beam fractions 616, 618 penetrate into the solid 1 viathe penetration surface 626 to produce the physical modification 9.

The focus 620 is preferably produced in a superposed fraction of atleast two intersecting light beam waists 630, 632, wherein the lightbeam waists 630, 632 are produced by the light beam fractions 616, 618or light beams 606.

Thus, a method for producing a detachment region in a solid, inparticular for splitting the solid along the detachment region isdescribed, wherein the solid portion to be detached is thinner than thesolid reduced by the solid portion, at least comprising the steps:modifying the crystal lattice of the solid by means of a modifyingagent, in particular by means of at least one laser, in particular apico- or femtosecond laser, wherein the modifications, in particular thelaser beams penetrate into the solid via a surface of the solid portionto be detached, wherein a plurality of modifications are produced in thecrystal lattice,

wherein as a result of the modifications, the crystal lattice cracks inthe regions surrounding the modifications, at least in respectively oneportion.

Furthermore, a method for producing a detachment region (2) in a solid(1), in particular for splitting the solid (1) along the detachmentregion (2) is described, at least comprising the steps: modifying thecrystal lattice of the solid (1) by means of an application by amodifying agent, in particular by means of at least one laser, inparticular a pico- or femtosecond laser, wherein a plurality ofmodifications (9) are produced in the crystal lattice, wherein as aresult of the modifications (9) the crystal lattice cracks in theregions surrounding the modifications (9) at least in respectively oneportion.

REFERENCE LIST

-   1 Solid-   2 Detachment region-   4 Laser beam-   5 Polished surface-   6 Laser beam in solid-   8 Focus-   9 Modification-   10 First solid portion-   12 Second solid portion-   13 Crack-   14 Location of start of treatment-   15 Centre of modifications-   16 Underside of solid-   17 Reference length-   18 Main surface-   19 Lateral surface-   20 Linear spacing between linearly produced crystal lattice    modifications-   22 Linear spacing between linearly produced crystal lattice    modifications-   23 Further modification-   25 First crack portion-   27 Second crack portion-   28 Third crack portion-   29 Fourth crack portion-   30 Rotary table-   31 Crack between outer edge and first modification block-   32 Crack between two modification blocks-   33 Crack between modification block and further modification block    or outer edge-   34 Crack between modification block and outer edge-   40 Optical system-   41 First region without modification block-   42 Second region without modification block-   43 Third region without modification block-   44 Fourth region without modification block-   45 Fifth region without modification block-   51 Unchanged material-   52 Changed material-   53 Raman spectrum-   54 Intensity in %-   56 Wavelength in cm⁻¹-   61 Graph for unchanged material fraction-   62 Graph for changed material fraction-   65 First aligning element-   66 Second aligning element-   67 Third aligning element-   68 Fourth aligning element-   69 Sensor means-   75 Data carrier element and/or data transmission element-   76 Groove-   77 Fluid inlet-   78 Fluid line-   79 Fluid outlet-   80 Guide-support structure-   71 First end of crack portion-   72 Second end of crack portion-   91 First block of modifications-   92 Second block of modifications-   112 Second solid layer-   113 Third solid layer-   300 Coupling layer-   630 Light beam waist-   632 Light beam waist-   400 Scanner-   401 Light beam source-   402 Light beam conductor-   403 Further light beam conductor-   501 Exposed surface of first solid layer-   502 Laser penetration surface of second solid layer-   503 Exposed surface of second solid layer-   504 Laser penetration surface of third solid layer-   505 Exposed surface of third solid layer-   606 Light beam-   608 Optical system-   610 First deflecting element-   612 Second deflecting element-   613 Third deflecting element-   616 First laser beam fraction-   618 Second laser beam fraction-   620 Focus-   622 First surface portion-   624 Second surface portion-   630 Laser beam waist-   632 Laser beam waist-   901 First field without modification-   902 Second field without modification-   903 Third field without modification-   A Example of a first defect arrangement-   B Example of a second defect arrangement-   C Example of a third defect arrangement-   D Example of a fourth defect arrangement-   Z Centre

1-15. (canceled)
 16. A method for producing a detachment region in asolid body, the method comprising: providing the solid body having acrystal lattice and that is at least partially transparent to laserbeams emitted by a laser; and modifying the crystal lattice of the solidby a laser beam, wherein the laser beam penetrates through a mainsurface of a detachable solid portion of the solid body, wherein aplurality of modifications are produced in the crystal lattice, whereinthe modifications are formed in a plane parallel to the main surface andat a distance from one another, wherein as a result of themodifications, the crystal lattice cracks regions surrounding themodifications sub-critically in at least one portion, wherein thesubcritical cracks are arranged in a plane parallel to the main surface.17. The method of claim 16, wherein the cracks pass at least in sectionsthrough a majority of the modifications.
 18. The method of claim 16,wherein the crystal lattice tears in a portion spaced apart from acenter of each modification.
 19. The method of claim 18, wherein thecracks pass at least in sections at a distance from a majority of themodifications.
 20. The method of claim 18, wherein a first number ofmodifications are produced with their center on one side of thedetachment region and a second number of modifications are produced withtheir center on the other side of the detachment region.
 21. The methodof claim 16, wherein the laser has a pulse spacing between 0.01 μm and10 μm and a pulse repetition frequency between 16 kHz and 1024 kHz. 22.The method of claim 16, wherein: in at least two different regions ofthe solid body, the number of modifications produced per cm2 isdifferent; a first block of modification lines is produced in a firstregion, the individual lines of the first block being produced spacedapart from one another by less than 20 μm; a first partial detachmentregion is formed by the first block of modifications; a second block ofmodification lines is produced in a second region, the individual linesof the second block being produced spaced apart from one another by lessthan 20 μm; a second partial detachment region is formed by the secondblock of modifications; the first region and the second region arespaced apart from one another by a third region; in the third region,none or substantially no modifications or fewer modifications per cm2compared with the first or second region are produced by the laser beam;and the first region is spaced apart from the second region by more than20 μm.
 23. The method of claim 22, wherein the modifications in thefirst block are produced in pulse spacings between 0.01 μm and 10 and apulse repetition frequency between 16 kHz and 20 MHz is provided. 24.The method of claim 16, wherein the individual sub-critical crackscombine to form a main crack through which the solid body is at leastpartially split.
 25. The method of claim 16, wherein: the modificationsare produced in a first section of the solid body such that a main crackis formed extending through a plurality of the sub-critical cracks;after the formation of the main crack, modifications are produced in atleast one further section of the solid; and the main crack is furtherguided through cracks in an area of the further modifications into theat least one further section.